Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  The vavle opens when pressure is applied at the pilot port.  The bellows assembly can be replaced, reducing maintenance costs and waste materials.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows.  Numerous seal materials are available for a wide range of chmical compatibility.

• Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
• High corrosion resistance to fluorine gas
• Minimal outgassing
• Minimal contamination from heavy metals
• Optional heaters
• Optional position sensors
• Optional oxalic acid anodizing for internals

Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  The bellows assembly can be replaced, reducing maintenance costs and waste materials.

• Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
• High corrosion resistance to fluorine gas
• Minimal outgassing
• Minimal contamination from heavy metals
• Optional heaters
• Optional position sensors
• Optional oxalic acid anodizing for internals

XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination

• Air pressure applied to pilot port shifts piston-coupled valve
• Numerous maintenance parts available to extend useful life of valve
• Standard FKM seals, plus 8 additional seal compound options
• Auto switches mountable from 4 directions
• Optional 100°C and 150°C heaters (UL compliant lead wire)

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• Light weight and compact
• Uniform baking temperature
• High fluorine resistance
• Low outgassing
• Little heavy metal contamination

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• Light weight and compact
• Uniform baking temperature
• High fluorine resistance
• Low outgassing
• Little heavy metal contamination

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion.  A low sputtering yield and the absence of heavy metals avoid wafer contamination.

• Air pressure applied to pilot port shifts opens piston-coupled valve
• Numerous maintenance parts available to extend useful life of valve
• Standard FKM seals, plus 8 additional seal compound options
• Auto switches mountable from 4-directions
• Optional 100°C to 150°C heaters (UL compliant lead wire)

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed.  The spring an shaft are exposed to gas flow, but a scraper and O-ring seal the piston pressure volume from process gases.  The XLFV opens when pressure is applied at the pilot port, which is controlled by a body mounted solenoid valve.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and an electroless nickel plated steel spring.  The XLFV bellows are 316L stainless steel.  Numerous seal material are available for a wide range of chemical compatibility.

• Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
• High corrosion resistance to fluorine gas
• Minimal outgassing
• Minimal contamination from heavy metals
• Optional heaters
• Optional position sensors
• Optional oxalic acid anodizing for internals

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• Particulates are reduced because there are no sliding metal parts
• Pressure balance mechanism allows unrestricted exhaust direction
• Can be used in portable equipment since air for drive is not required
• A control power supply circuit for solenoid valve drive has been made standard

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• High vacuum angle valve
• Type: manual, bellows seal
• Flange size: 16 ~ 50
• Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
• Auto switches not available

XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.

• Air pressure applied to pilot port shifts piston-coupled valve
• Replaceable bellows reduces maintenance cost and waste material
• Additional maintenance parts available to extend useful life of valve
• Standard FKM seals, plus 8 additional seal compound options
• Auto switches mountable from 4 directions
• Optional 100°C and 150°C heaters (UL compliant lead wire)

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• One-touch connection & release, requires no tools
• Lightweight & compact
• Auto switch capable
• XLAQ: single acting, normally closed, bellows seal
• XLAQ: flange sizes are 16, 25, 40, 50
• XLDQ: 2-step control, single acting
• XLDQ: flange sizes are 40, 50

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• Compatible with inert gases
• Flange sizes: 25 and 40
• Operating pressure range: Atmospheric to 0.01 Pa
• Operating temperature: 5-40°C
• Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC