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XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance
![](https://content2.smcetech.com/image/large/8495.jpg)
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Particulates are reduced because there are no sliding metal parts
- Pressure balance mechanism allows unrestricted exhaust direction
- Can be used in portable equipment since air for drive is not required
- A control power supply circuit for solenoid valve drive has been made standard
Copy Configuration Number
https://content2.smcetech.com/pdf/XL_US2.pdf
Configuration
Highlight the number above and click Ctrl+C (⌘+C) to copy.
Options in:
- Gray are not compatible with other selected option value.
- Red conflict with another selected option value.
- Amber are not recommended.
Downloads
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Model does not exist, please email customer.service@airlinehyd.com with the complete part number, CAD file format and version required.