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XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
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XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
- Air pressure applied to pilot port shifts piston-coupled valve
- Replaceable bellows reduces maintenance cost and waste material
- Additional maintenance parts available to extend useful life of valve
- Standard FKM seals, plus 8 additional seal compound options
- Auto switches mountable from 4 directions
- Optional 100°C and 150°C heaters (UL compliant lead wire)
Copy Configuration Number
https://content2.smcetech.com/pdf/XL_US2.pdf
Configuration
Highlight the number above and click Ctrl+C (⌘+C) to copy.
Options in:
- Gray are not compatible with other selected option value.
- Red conflict with another selected option value.
- Amber are not recommended.
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Model does not exist, please email customer.service@airlinehyd.com with the complete part number, CAD file format and version required.