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XLJ, Vacuum Angle Valve w/Release Valve
![](https://content2.smcetech.com/image/large/XLJ.jpg)
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Compatible with inert gases
- Flange sizes: 25 and 40
- Operating pressure range: Atmospheric to 0.01 Pa
- Operating temperature: 5-40°C
- Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC
Copy Configuration Number
https://content2.smcetech.com/pdf/XLJ.pdf
Configuration
Highlight the number above and click Ctrl+C (⌘+C) to copy.
Options in:
- Gray are not compatible with other selected option value.
- Red conflict with another selected option value.
- Amber are not recommended.
Downloads
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Model does not exist, please email customer.service@airlinehyd.com with the complete part number, CAD file format and version required.