XLJ, Vacuum Angle Valve w/Release Valve
Show DescriptionHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Compatible with inert gases
- Flange sizes: 25 and 40
- Operating pressure range: Atmospheric to 0.01 Pa
- Operating temperature: 5-40°C
- Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC
Copy Configuration Number
https://content2.smcetech.com/pdf/XLJ.pdf
Configuration
Highlight the number above and click Ctrl+C (⌘+C) to copy.
Options in:
- Gray are not compatible with other selected option value.
- Red conflict with another selected option value.
- Amber are not recommended.
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