

Valves (All Types)
SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.
- High purity chemical valves
- Single type and stacking type for manifold
- Orifice diameter: ø4, ø8, ø12, ø20
- Port sizes: 1/8, 1/4, 3/8, 1/2, 3/4, 1
- Body material: SUS, PPS, PFA
- Options: flow rate adjustment, indicator

Manifolds
SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.
- Manifold base for high purity chemical valve
- Stacking type manifold
- Common IN/Individual OUT
- Port sizes: 1/4, 3/8, 1/2, 3/4
- Valve stations: 2 to 5
- Manifold material: PFA