XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release
Show DescriptionHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- One-touch connection & release, requires no tools
- Lightweight & compact
- Auto switch capable
- XLAQ: single acting, normally closed, bellows seal
- XLAQ: flange sizes are 16, 25, 40, 50
- XLDQ: 2-step control, single acting
- XLDQ: flange sizes are 40, 50
Copy Configuration Number
https://content2.smcetech.com/pdf/XLAQ_XLDQ.pdf
Configuration
Highlight the number above and click Ctrl+C (⌘+C) to copy.
Options in:
- Gray are not compatible with other selected option value.
- Red conflict with another selected option value.
- Amber are not recommended.
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