Airline Hydraulcs

AZ9200, Single Stage Regulator for Ultra High Purity, High Flow (Tied-diaphragm)

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AZ9200, Single Stage Regulator for Ultra High Purity, High Flow (Tied-diaphragm)

Show Description
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
  • For UHP gas delivery
  • Flow capacity to 2000 slpm 
  • Body material: 316L SS
  • Inlet pressure:  max. 300 psig (2.1 MPa)

 

Configuration Options
  
 
Copy Configuration Number
https://content2.smcetech.com/pdf/AZ_UltraHighPurity.pdf
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Delivery Pressure Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Bonnet Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Configuration

Highlight the number above and click Ctrl+C (⌘+C) to copy.

Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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