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Products » Process Gas Equipment » Pressure Regulators » Pressure Reducing » Manual Adjust
Products » Process Gas Equipment » Pressure Regulators » Pressure Reducing » Manual Adjust
![SL5200, Single Stage Compact Regulator for Ultra High Purity](https://content2.smcetech.com/image/medium/SL.jpg)
SL5200, Single Stage Compact Regulator for Ultra High Purity
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Standard flow capacity: to 30 slpm; high flow capacity: to 130 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Sub-atmospheric pressure delivery option
![SL5500, Single Stage Regulator for Ultra High Purity, Low Flow](https://content2.smcetech.com/image/medium/SL.jpg)
SL5500, Single Stage Regulator for Ultra High Purity, Low Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Flow capacity to 30 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Sub-atmospheric pressure delivery option
![SL5400, Single Stage Regulator for Ultra High Purity, Intermediate Flow](https://content2.smcetech.com/image/medium/SL.jpg)
SL5400, Single Stage Regulator for Ultra High Purity, Intermediate Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Springless design (no poppet spring in the wetted area)
- Intermediate flow
![SL5800, Single Stage Regulator for Ultra High Purity, Intermediate Flow](https://content2.smcetech.com/image/medium/SL.jpg)
SL5800, Single Stage Regulator for Ultra High Purity, Intermediate Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Body material: 316L SS secondary remelt
- Inlet pressure: max. 3800 psig (2.1 MPa)
- Springless design (no poppet spring in the wetted area)
- Intermediate flow